Polycrystalline silicon rings pass quality tests
Semiconductor components manufacturer BC&C said Monday it received an order for nitride-free polycrystalline (policy) focus rings from a North American-based chip manufacturer.
Korean parts manufacturer SD9+P has passed quality tests, mass production and their supply will begin within the first quarter.
Focus rings are used to place silicon wafers in place during the etching process of chip production. They are made of silicon, silicon carbide and quartz.
Single crystal silicon rings are expensive, more sensitive to temperature, making them difficult to mass-produce.
On the other hand, more frequently used Poly-Si forms nitrides that are not needed in wafer manufacturing.
BC&C’s nitride-free ring will begin production through demonstration equipment in 2023, but the company currently has a mass production facility.
The company said it also reduced material volume and process times. BC&C said its polysingo is circular rather than rectangular, making it more cost-competitive than its Chinese competitors.
Meanwhile, BC&C wants to expand its single crystal silicon ring called SD9+S, Business.
저작권자©TheELEC, Korean Electronics Industry Media
